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Axis Colinearity Calibration Procedure

The procedure for Colinearity Calibration is given directly in the tab at the bottom of the Calibrate Axis Co-linearity view. The procedure is briefly reiterated below, with images for reference.

  1. Choose a sample on which you can identify a unique feature to use in this procedure. This example uses the top left-hand corner of a calibration grid.
  2. Center on the unique feature and focus the optics. Do not engage.
  3. In the Menu bar of the Navigator window, go to Calibrate > Optical > Optics/SPM Axis Co-linearity.... The Axis Colinearity Instructions will appear at the bottom of the window:

(Hover over the image to view larger)

  1. Ensure that the optical field of view parameters are accurate. This is the entire field of view, not the current zoom size. The default values should be correct.
  2. Click Next.
  3. Click in the video panel to select the unique feature:

(Hover over the image to view larger)

  1. Click Next. The Z stage will move to a new position. The crosshairs may now be offset from their original location relative to the sample:

(Hover over the image to view larger)

  1. In the video panel, click the same unique feature selected in step 6 to reposition the crosshairs:

(Hover over the image to view larger)

  1. Click Finish to complete the calibration procedure.

 

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